Halide precursors

Aluminum Chloride AlCl₃

• Melting point: 192.6°C

• Boiling point: 182.7°C (sublimes)

• Condensed phase density: 2.44 g/cm³ (at 25°C)

• Molar mass: 133.34 g/mol

Aluminum Tribromide AlBr₃

• Melting point 98°C

• Boiling point 255°C

• Condensed phase density 3.01 g/cm³ (at 25°C)

• Molar mass 266.69 g/mol

Aluminum Triiodide AlI₃

• Melting point 191°C

• Boiling point 382°C

• Condensed phase density 3.98g/cm³ (at 25°C)

• Molar mass 407.69 g/mol

Aluminum chlorination

Aluminum chlorides can be produced inside a CVD reactor by passing dry hydrogen chloride (HCl) or Chlorine (Cl₂) gas over a boat with aluminum pellets.

The composition of produced chlorides mainly depends on chlorination temperature --- at temperatures below 900°C aluminum trichloride AlCl₃ and its dimer Al₂Cl₆ are the main reaction products. At higher temperatures, aluminum monochloride AlCl becomes dominant.