Halide precursors

Molybdenum (V) Chloride (MoCl5)

  • CAS Registry Number 10241-05-1

  • Melting point 194°C

  • Boiling point 268°C

  • Condensed phase density 2.925 g/cm3 (at 25°C)

  • Molar mass 273.2 g/mol

Saturated vapor pressure.

# T -- temperature, C
# P -- saturated  vapor pressure, atm
# S. A. Shchukarev, A. V. Suvorov, Vestnik LGU, ser. khim, 1961 (4).
if 20 < T < 200:
  P = 10**(9.15-4750/(T+273.15))
if 200 < T < 268:
  P = 10**(5.536-3036/(T+273.15))

MoCl<sub>5</sub> saturated vapor pressure

Molybdenum (VI) Fluoride (MoF6)

  • CAS Registry Number 7783-77-9

  • Melting point: 17.5°C

  • Boiling point: 35°C

  • Triple point: 17.4°C, 398.1 Torr

  • Condensed phase density: 2.551 g/cm3 (at 25°C)

  • Molar mass: 209.95 g/mol

Saturated vapor pressure.

# T -- temperature, C
# P -- saturated vapor pressure, Torr
# O.Ruff, E.Ascher, ZAAC, 196, 1931, 413-420
if 20 < T < 80:
    P = 10 ** (-1394.9/(T+273.15)+7.407)

# J. Chem. Soc., 1961, 1563-1568
if -60 <= T <= -8.7:
    P = 10 ** (10.216 - 2166.6/(T+273.15))
if -8.7 <= T <= 17.4:
    P = 10 ** (8.533 - 1722.9/(T+273.15))
if 17.4 <= T <= 34:
    P = 10 **(7.766-1499/(T+273.15))

MoF6<sub>5</sub> saturated vapor pressure

Organic precursors

Molybdenum Hexacarbonyl (Mo(CO)6)

  • CAS Registry Number 13939-06-5

  • Melting point 148°C

  • Boiling point 155°C

  • Condensed phase density 1.96 g/cm3 (at 20°C)

  • Molar mass 264.02 g/mol

Saturated vapor pressure.

# T -- temperature, C
# P -- saturated vapor pressure, Torr
# V.G. Syrkin. Chemistry and Technology of Carbonyl Metals.

if  55 <= T <= 145:
  P = 10 ** (11.7274 - 3788.32 / (T + 273.15))

Mo(CO)<sub>6</sub> saturated vapor pressure

Bibliography

  1. Shchukarev, S. A., & Suvorov, A. V. (1961). Thermodynamic Studies Of Chlorine Compounds Of Molybdenum And Tungsten. Vestnik LGU, ser. khim, (4).

  2. George H. Cady and George B. Hargreaces, The Vapour Pressures of Some Heavy Transition-metal Hexafluorides. J. Chem. Soc., 1961, 1563-1568 doi:10.1039/JR9610001563

  3. Otto Ruff and Ernst Ascher, "Einige Physikalische Konstanten von SiF4, WF6, and MoF6," Zeitschrift fur anorganische und allgemeine Chemie, 196, 413-420 (1931). doi:10.1002/zaac.19311960138

  4. V.G. Syrkin. Metal Carbonyls. Moscow, Chemistry, 1983. [in Russian]

  5. V.G. Syrkin. Chemistry and Technology of Carbonyl Metals. Moscow, Chemistry, 1972. [in Russian]