Halide precursors

Silicon Tetrachloride SiCl₄

• Melting point: -68.9°C

• Boiling point: 57.0°C

• Condensed phase density: 1.48g/cm³ (at 20°C)

• Molar mass: 169.9 g/mol

Saturated vapor pressure.

# T -- temperature, C
# P -- saturated  vapor pressure, Torr
if  0 <= T <= 60:
    P = 10 ** (7.64 - 1572 / (T + 273.15))

Silicon Tetrafluoride SiF₄

• Melting point: -86.8°C

• Boiling point: -65.0°C

• Critical temperature: -14.15°C

• Critical pressure: 3.75 MPa

• Molar mass: 169.9 g/mol

Hexachlorodisilane Si₂Cl₆

• Melting point: -1°C

• Boiling point: 144°C

• Condensed phase density: 1.56g/cm³ (at 25°C)

• Molar mass: 268.9 g/mol

Saturated vapor pressure.

  # T -- temperature, C
  # P -- saturated  vapor pressure, atm
  # Kelley, U. S. Bur. Mines. Biill. 383, (1935)
  if -1 <= T <= 144:
      P = 10 ** ( 5.838 - 2404 / (T + 273.15))

Bibliography

1. А.А. Furman, Inorganic Chlorides, 1980

2. Kelley, U. S. Bur. Mines. Biill. 383, (1935).