Halide precursors

Tungsten Hexachloride WCl6

  • CAS Registry Number: 13283-01-7

  • Melting point: 281.5°C

  • Boiling point: 348°C

  • Condensed phase density: 3.52 g/cm3 (at 25°C)

  • Molar mass: 396.57 g/mol

  • Heat of vaporization: 14.9 kcal/mol

  • Heat of sublimation, beta-solid: 16.4 kcal/mol

  • Heat of sublimation, alpha-solid: 18.3 kcal/mol

  • Vaporization entropy: 24.3 e.u. (330°C)

Saturated vapor pressure.

# T -- temperature, C
# P -- saturated  vapor pressure, Torr
# Stevenson, F. D., Wicks, C. E., & Block, F. E. (1963)
# Liquid
if 281.5 <= T <= 325:
  P = 10 ** (8.194 - 3253/(T+273.15))
# beta-solid
if 230.0 <= T <= 281.5:
  P = 10 ** (8.794 - 3588/(T+273.15))
# alpha-solid
if 185.0 <= T <= 230:
  P = 10 ** (9.615 - 3996/(T+273.15))

WCl<sub>6</sub> saturated vapor pressure

Tungsten Hexafluoride WF6

  • CAS Registry Number: 7783-82-6

  • Melting point: 2.5°C

  • Boiling point: 17.3°C

  • Condensed phase density: 4.56 g/cm3 (solid T < -8.5°C), 3.99 g/cm3 (solid at 0°C), 3.4 g/cm3 (liquid at 20°C)

  • Molar mass: 297.84 g/mol

  • Triple point: 2.0°C, 413.2 Torr

Saturated vapor pressure.

# T -- temperature, C
# P -- saturated  vapor pressure, Torr
# J. Chem. Soc., 1961, 1563-1568
if -60 <= T <= -8.2:
    P = 10 ** (9.951 - 2006/(T + 273.15))
if -8.2 <= T <= 2.0:
    P = 10 ** (8.758 - 1689.9/(T + 273.15))
if 2.0 <= T <= 17.1:
    P = 10 ** (7.635 - 1380.5/(T + 273.15))

WF<sub>6</sub> saturated vapor pressure

Organic precursors

Tungsten hexacarbonyl W(CO)6

Saturated vapor pressure.

# T -- temperature, C
# P -- saturated vapor pressure, Torr
# V.G. Syrkin. Chemistry and Technology of Carbonyl Metals
P = 10 ** (11.523 - 3872 / (T + 273.15))

W(CO)6 saturated vapor pressure

Bibliography

  1. George H. Cady and George B. Hargreaces, The Vapour Pressures of Some Heavy Transition-metal Hexafluorides. J. Chem. Soc., 1961, 1563-1568 doi:10.1039/JR9610001563

  2. Stevenson, F. D., Wicks, C. E., & Block, F. E. (1963). Vapor pressure of tungsten (VI) chloride and hafnium (IV) iodide by a metal diaphragm technique (No. BM-RI-6367). Bureau of Mines, Albany, OR (USA). Albany Metallurgy Research Center.

  3. Siegel, S., & Northrop, D. A. (1966). X-ray diffraction studies of some transition metal hexafluorides. Inorganic Chemistry, 5(12), 2187-2188

  4. Alyea, E. D., Gallagher, L. B., Mullens, J. H., & Teem, J. M. (1957). A WF6 bubble chamber. Il Nuovo Cimento (1955-1965), 6(6), 1480-1488.

  5. V.G. Syrkin. Chemistry and Technology of Carbonyl Metals. Moscow, Chemistry 1972. [in Russian]